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SS:온도제어 AA:전창완
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온도제어를 통한 반도체 시험용 Plate의 기계적 온도 편차 감소 선택
온도제어를 통한 반도체 시험용 Plate의 기계적 온도 편차 감소
전창완
| 순천향대학교 산업기술연구소 |
2000
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AR0059988
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순천향대학교 산업기술연구소
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