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AA:정해도 PP:한국재료학회 AA:장수천
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계면활성제 함량 조절을 통한 구리 하이브리드 구조물의 화학 기계적 평탄화 선택
계면활성제 함량 조절을 통한 구리 하이브리드 구조물의 화학 기계적 평탄화
장수천
| 한국재료학회 |
2012
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AR0060246
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620.1 한16ㅎ
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