자료유형  

 학위논문

Control Number  

0017163807

International Standard Book Number  

9798384450276

Dewey Decimal Classification Number  

620

Main Entry-Personal Name  

Bustamante Eguiguren, Mauricio J.

Publication, Distribution, etc. (Imprint  

[S.l.] : University of California, Berkeley., 2024

Publication, Distribution, etc. (Imprint  

Ann Arbor : ProQuest Dissertations & Theses, 2024

Physical Description  

88 p.

General Note  

Source: Dissertations Abstracts International, Volume: 86-03, Section: B.

General Note  

Advisor: Maharbiz, Michel;Pister, Kristofer S. J.

Dissertation Note  

Thesis (Ph.D.)--University of California, Berkeley, 2024.

Summary, Etc.  

요약Swimming microrobots have significant potential for biomedical applications and distributed sensing. To date, most work has relied on external fields for control control. To achieve autonomy, locally controllable propulsion mechanisms must be developed. This thesis presents an rotary inchworm motor designed to drive an artificial flagellum, inspired by bacterial flagellar motors found in nature. The design adapts electrostatic gap closing actuators with angled arms for rotational motion. The devices are fabricated in an SOI process with a bonded lid featuring through-wafer vias as a mechanical feedthrough for the flagellum. A hydrophobic coating is applied to prevent water ingress through small gaps, thus keeping the gap closing actuators dry. This process also provides an additional layer of routing for reduced complexity. Motors with rotation rates up to 633 rpm at actuation frequencies of 1.7 kHz are demonstrated to operate reliably in dry conditions. Additionally, promising electrical and optical results are presented, preventing water ingress to gap-closing actuators at low pressures. Effective operation of the mechanism underwater remains a challenge.

Subject Added Entry-Topical Term  

Engineering.

Subject Added Entry-Topical Term  

Biomedical engineering.

Subject Added Entry-Topical Term  

Electrical engineering.

Index Term-Uncontrolled  

Swimming microrobots

Index Term-Uncontrolled  

Biomedical applications

Index Term-Uncontrolled  

Artificial flagellum

Index Term-Uncontrolled  

Electrostatic gap

Index Term-Uncontrolled  

Bacterial flagellar

Added Entry-Corporate Name  

University of California, Berkeley Electrical Engineering & Computer Sciences

Host Item Entry  

Dissertations Abstracts International. 86-03B.

Electronic Location and Access  

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Control Number  

joongbu:654839