Material Type  

 학위논문

 

0016052491

Date and Time of Latest Transaction  

20220210093300

ISBN  

9798516062063

DDC  

660

Author  

Zhang, Yichi.

Title/Author  

Multiscale Computational Fluid Dynamics Modeling of Thermal and Plasma Atomic Layer Deposition: Application to Chamber Design and Process Control.

Publish Info  

[S.l.] : University of California, Los Angeles., 2021

Publish Info  

Ann Arbor : ProQuest Dissertations & Theses, 2021

Material Info  

152 p.

General Note  

Source: Dissertations Abstracts International, Volume: 82-12, Section: B.

General Note  

Advisor: Christofides, Panagiotis D.

학위논문주기  

Thesis (Ph.D.)--University of California, Los Angeles, 2021.

Restrictions on Access Note  

This item must not be sold to any third party vendors.

Subject Added Entry-Topical Term  

Chemical engineering.

Subject Added Entry-Topical Term  

Fluid mechanics.

Index Term-Uncontrolled  

Atomic layer deposition

Index Term-Uncontrolled  

Computational fluid dynamics

Index Term-Uncontrolled  

Control

Index Term-Uncontrolled  

Kinetic Monte Carlo

Index Term-Uncontrolled  

Machine learning

Index Term-Uncontrolled  

Plasma enhanced atomic layer deposition

Added Entry-Corporate Name  

University of California, Los Angeles Chemical Engineering 0294

Host Item Entry  

Dissertations Abstracts International. 82-12B.

Host Item Entry  

Dissertation Abstract International

Electronic Location and Access  

로그인을 한후 보실 수 있는 자료입니다.

소장사항  

202202 2022

Control Number  

joongbu:612839