자료유형  

 단행본

International Standard Book Number  

3540433392 (hc : alk. paper) : Euro 69.95

Library of Congress Call Number  

TK7874.75-.I87 2002

Dewey Decimal Classification Number  

621.39/5-20

Main Entry-Personal Name  

Itsumi, Manabu

Publication, Distribution, etc. (Imprint  

Tokyo : Kodansha, c2002.

Physical Description  

xiii, 322 p. : ill. ; 25 cm.

Bibliography, Etc. Note  

Includes bibliographical references and index.

Subject Added Entry-Topical Term  

Integrated circuits Very large scale integration Design and construction.

Subject Added Entry-Topical Term  

Semiconductors Materials.

Subject Added Entry-Topical Term  

Silica.

Control Number  

joongbu:235079