자료유형  

 단행본

International Standard Book Number  

1402010656 (acid-free paper)

Dewey Decimal Classification Number  

530.4/16-20

Main Entry-Personal Name  

Oks, E. M.

Publication, Distribution, etc. (Imprint  

Dordrecht ; |a Boston : Kluwer Academic Publishers, 2003.

Physical Description  

vii, 235 p. : ill. ; 25 cm.

Bibliography, Etc. Note  

Includes bibliographical references and index.

Subject Added Entry-Topical Term  

Ion bombardment.

Subject Added Entry-Topical Term  

Plasma (Ionized gases)

Subject Added Entry-Topical Term  

Electron beams.

Subject Added Entry-Topical Term  

Vacuum arcs.

Added Entry-Personal Name  

Brown, Ian G.

Control Number  

joongbu:225095